NF3

NF3

time:2016/7/23 16:00:11

NF3, which we development was started in 1979 and over 40 years of research, development and manufacturing experience has been accumulated ever since. NF3 is an important gas for cleaning and etching purposes and is widely applied in semiconductor and liquid crystal industries. PERIC has established 1350 t/a production line for high-purity (99.999%) NF3, with independent intellectual property rights, which gains the institute well social and economical benefits. NF3 produced by our institute has been supplied to nearly all semiconductor factories and most liquid crystal manufacturers in China, and exported to many countries or regions including Taiwan, Japan, Singapore, Europe, US etc.

 


Gas Identification:
Name: Nitrogen Trifluoride
Molecular Formula: NF3
Physicochemical Specifications:

Molecular Weight 

Melting Point 

Boiling Point 

Critical Temperature 

Critical Pressure 

Liquid Density 

Gas Density 

Solubility in Water 

CAS No. 

Hazard Category 

71.01 

-206.8°C 

(1atm) 

-129°C (1atm) 

-39.3°C 

44.02atm(4.46MPa) 

1554kg/m3(1atm at boiling point) 

2.95kg/m3(1atm 21°C 

1.43*10-5 normal concentration(1atm22°C) 

7783-54-2 

Category 2.3, maximum permissible toxic gas content 29mg/m3 

 

Packing Specifications:
Cylinder (47L), Bundle (16×47L), Bundle (25×47L), Y-Cylinder (470L), ISO etc. 

Steel Cylinder Volume 

Steel Cylinder Model 

Valve 

Steel Cylinder Pressure 

Gaseous Mass 

DG No. 

UN No. 

Packaging Category 

Packaging Mark 

47 L, 43.3 L, 40 L, 8 L 

DOT-3AA, GB5099 

CGA330, CGA640 

9.0-13.0 MPa 

22 kg, 20 kg, 3.4 kg 

23016 

2451 

II 

6 

 

Storage and Transportation:
NF3 cylinders shall be stored in shady and cool warehouse with well ventilation.
NF3 cylinders shall be kept away from fire and heat source, protected from direct sunshine, and shall be stored separately from reductant, inflammable or combustible materials.
NF3 cylinders shall be gently loaded and unloaded during the transportation to protect the cylinder and its accessories from being damaged.
NF3 cylinders shall be transported as per requirements of dangerous goods transportation. NF3 cylinders shall be well mounted with the cylinder supporting structure during the transportation, and shall be transported by means of road transportation or ship containers.

 

Emergency Treatment for Leakage:
In case of NF3 leakage, staff shall evacuate from leakage contaminated area immediately and try to take measures to stop further leakage. Staff poisoned shall be sent to hospital for treatment without delay.
Leakage site shall be treated with no delay. Staff doing the treatment work must wear gas mask and self-closed-circuit oxygen breathing apparatus. Only when no hazardous gas is detected in the leakage area, can staff enter. Leakage container must be examined with care, repaired or well processed before future usage.

Product Quantity Standard for NF3Q/718J58-2013: 

Impurity 

NF3≥99.995% Vol.% 

NF3≥99.99% Vol.% 

NF3≥99.98% Vol.% 

NF3≥99.9% Vol.% 

CF4 

≤20 Vol.ppm 

≤40 Vol.ppm 

≤100 Vol.ppm 

≤500 Vol.ppm 

N2 

≤5 Vol.ppm 

≤5 Vol.ppm 

≤10 Vol.ppm 

≤50 Vol.ppm 

O2+Ar 

≤3 Vol.ppm 

≤5 Vol.ppm 

≤10 Vol.ppm 

≤50 Vol.ppm 

CO2 

≤1 Vol.ppm 

≤5 Vol.ppm 

≤10 Vol.ppm 

≤10 Vol.ppm 

H2O 

≤1 Vol.ppm 

≤1 Vol.ppm 

≤1 Vol.ppm 

≤1 Vol.ppm 

Solid Component (measured with HF) 

≤1 Vol.ppm 

≤1 Vol.ppm 

≤1 Vol.ppm 

≤1 Vol.ppm 

SF6 

≤1 Vol.ppm 

≤2 Vol.ppm 

≤2 Vol.ppm 

≤25 Vol.ppm 

N2O 

≤1 Vol.ppm 

≤5 Vol.ppm 

≤10 Vol.ppm 

≤10 Vol.ppm 

CO 

≤0.5 Vol.ppm 

≤5 Vol.ppm 

≤10 Vol.ppm 

≤10 Vol.ppm